Phosphoric Acid Electronic Grade

Tailored to the needs of the electronic industry.

  EWC-E-Grade-Phosphoric-Acid Click to enlarge

Electronic-Wet-Chemicals-iconPhosphoric Acid is highly selective in etching Si3N4 instead of SiO2. In combination with INTEROX® hydrogen peroxide and water, it is used to etch aluminium and InGaAs selective to InP.

Solvay offers Electronic Grade Phosphoric Acid from its site in Bernburg, Germany. It is tailored to the needs of the electronic industry with a focus on the wet processing steps in the manufacture of semiconductor wafers.

Electronic Grade Phosphoric Acid is available in 2 grades:

GradeCationic impurities
SEMI Grade 1see sales specifications sheet
SEMI Grade 2see sales specifications sheet

Further information

Technical Data

Physical and Chemical Data
Appearance: viscous liquid
Odour: characteristic
Melting point / freezing point: ca. 21 °C
Boiling point / boiling range:ca. 135 °C
Flash point: ./.


Product name:Phosphoric Acid
Substance name:Phosphoric Acid
Concentration:79% - 86%
CAS-no.:7664-38-2 / EC-No.: 231-633-2 / Index-No.: 015-011-00-6
Type of product: Mixture
Synonyms:Orthophosphoric Acid, White Phosphoric Acid


Bernburg, Germany