H2O2 Electronic Grade
Localized for US - High purity grades for the semiconductor industry.
Phosphoric Acid is highly selective in etching Si3N4 instead of SiO2. In combination with INTEROX® hydrogen peroxide and water, it is used to etch aluminium and InGaAs selective to InP.
Solvay offers Electronic Grade Phosphoric Acid from its site in Bernburg, Germany. It is tailored to the needs of the electronic industry with a focus on the wet processing steps in the manufacture of semiconductor wafers.
|SEMI Grade 1||see sales specifications sheet|
|SEMI Grade 2||see sales specifications sheet
|Physical and Chemical Data|
|Melting point / freezing point:||ca. 21 °C|
|Boiling point / boiling range:||ca. 135 °C|
|Product name:||Phosphoric Acid|
|Substance name:||Phosphoric Acid|
|Concentration:||79% - 86%|
|CAS-no.:||7664-38-2 / EC-No.: 231-633-2 / Index-No.: 015-011-00-6|
|Type of product:||Mixture|
|Synonyms:||Orthophosphoric Acid, White Phosphoric Acid|