Elemental Fluorine (F2) electronic grade

For cleaning tools used in flat panel and photovoltaic production

  fluorine-specialties-f2-eg Click to enlarge

Elemental Fluorine (F2) is used to clean CVD tools used in flat panel (LCD) and photovoltaic production from deposition within the chamber, which is caused by the CVD process.

In addition to being a more efficient cleaning gas, compared to NFfor example, high purity Foffers the benefit of being environmental-friendly. The GWP (Global Warming Potential) of Fis zero compared to NF17900. 

Technical Data

Elemental Fluorine (F2) electronic grade

Physical and Chemical Data
Appearance: gas
Colour:almost colourless
Odour: pungent
Molecular Weight: 38 g/mol
Melting point / freezing point: -220 °C
Boiling point / boiling range:-188 °C
Flash point: ./.


Product name:Elemental Fluorine
Chemical name:Elemental Fluorine
Substance name:Elemental Fluorine
Concentration:99.9 %
CAS-no.:7782-41-4 / EC-No.: 231-954-8 / Index-No.: 009-001-00-0
Type of product: gas
Molecular formula: F2