Sulfur Hexafluoride (SF6) electronic grade

Used for the manufacturing of semiconductor devices, flat panels, photovoltaic panels and MEMS

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Sulfur Hexafluoride (SF6) is more and more used for the manufacturing of semiconductor devices such as IC (integrated circuits), flat panels, photovoltaic panels and MEMS (Micro-Electro-Mechanical-Systems). 

SFis applied in the above process as an etching gas. Due to the density and large molucule size, SFis a prefered etching gas in flat panel and MEMS production processes.

Fluorinated gases, such as Sulfur Hexafluoride (SF6), play very important roles in the manufacturing of silicon devices. 

Gas purity is of key importance in this market segment, because any possibility of contamination has to be minimized. For this purpose Solvay offers N5.0 material (purity min. 99.999 %)

Technical Data

Sulfur Hexafluoride (SF6) electronic grade

Physical and Chemical Data
Appearance: gas
Odour: odourless
Molecular Weight: 146 g/mol
Melting point / freezing point: -50.8 °C
Boiling point / boiling range:-63.8 °C, Sublimation point
Flash point: no data available


Product name:Sulfur hexafluoride
Chemical name:Sulfur hexafluoride
Substance name:Sulfur hexafluoride
Purity:min. 99.999 %
CAS-no.:2551-62-4 / EC-No.: 219-854-2 / Index-No.: - REACH Registration Number: 01-2119458769-17
Type of product: gas
Molecular formula: SF6